Investigation of Planarization Using Real Contact Area Measurement in CMP Process

Minji Kim, Seonho Jeong, Yeongil Shin, Youngwook Park, Haedo Jeong

Chemical Mechanical Planarization (CMP) is an essential process for device integration and planarization in a semiconductor manufacturing process. The most crit...

PDFHTMLPubReaderePub

DOI: https://doi.org/10.7736/JKSPE.022.028

A Study on the Dual Servo System for Nano Machining Processing

Gyung-Il Lee

In the framework of the 4th industrial revolution, modern machine building rapidly converges with IOT technology. This requires a very high level of precision m...

PDFHTMLPubReaderePub

DOI: https://doi.org/10.7736/JKSPE.022.066

Optimal Damping Control of Engine Mount and It’s Application to MR Mount

Tae Woong Ha, Min Sig Kang

Passenger ride comfort is an integral component of any road vehicle. Ride comport is impacted by vibration resulting from road roughness of low frequency, and a...

PDFHTMLPubReaderePub

DOI: https://doi.org/10.7736/JKSPE.022.055

CNN-based Human Recognition and Extended Kalman Filter-based Position Tracking Using 360^o LiDAR

Kibum Jung, Sung Hwan Kweon, Martin Byung-Guk Jun, Young Hun Jeong, Seung-Han Yang

The collaboration of robots and humans sharing workspace, can increase productivity and reduce production costs. However, occupational accidents resulting in in...

PDFHTMLPubReaderePub

DOI: https://doi.org/10.7736/JKSPE.022.025

Practical Blended Flow Models for Bulk Metal Forming Using the Cylindrical Tensile Test with Its Related Flow Behavior at Large Strain

Chang Woon Jee, Su Min Ji, Jong Bok Byun, Man Soo Joun

The fundamental flow models of metallic materials at room temperature, including the Ludwik, Hollomon, Swift and Voce models, were evaluated in terms of tensile...

PDFHTMLPubReaderePub

DOI: https://doi.org/10.7736/JKSPE.022.037

Fluid Structure Interaction Analysis of Movable Weir with Overflow Depth

Haesoo Lee, Taehyun Park

Movable weir is a major system used to manage water level in a river to secure drinking water, agricultural water, and industrial water. It is critical to safel...

PDFHTMLPubReaderePub

DOI: https://doi.org/10.7736/JKSPE.022.038

Development of Spiral Driving Type Pipe Inspection Robot System for Magnetic Flux Leakage

Min-Woo Jang, Jae-Youl Lee, Myeong-Su Jeong, Sung-Ho Hong, Dong-Ho Shin, Kap-Ho Seo, Jin-Ho Suh

The pipe inspection robot using the MFL non-destructive inspection equipment, has high inspection efficiency in the pipe with high magnetic permeability. Howeve...

PDFHTMLPubReaderePub

DOI: https://doi.org/10.7736/JKSPE.022.040

Solenoid Coil and Capacitor Design to Improve the Performance of Multi-Stage Coil Guns

Seonmyeong Kim, Jinho Kim

The purpose of this study was to design capacitors and a coil, which are components of an electric circuit, for improved performance of multi-stage electromagne...

PDFHTMLPubReaderePub

DOI: https://doi.org/10.7736/JKSPE.022.048

Structural Behavior Analysis according to Porous Structures of the Bone Scaffold in the Femoral Head

Jun Won Choi, Jung Jin Kim

The bone scaffold is artificial mechanical support, that is implanted on collapsed bone microstructure. The clinical field has become interested in that, becaus...

PDFHTMLPubReaderePub

DOI: https://doi.org/10.7736/JKSPE.022.041